GB/T 39159
GB/T 39159 (High purity copper alloy target for integrated circuit)· GB (China) · 6 materials
| Designation | Material group | |
|---|---|---|
| Cu-0.11Al | Copper | chevron_right |
| Cu-0.26Mn | Copper | chevron_right |
| Cu-0.43Mn | Copper | chevron_right |
| Cu-0.60Mn | Copper | chevron_right |
| Cu-0.69Mn | Copper | chevron_right |
| Cu-0.86Mn | Copper | chevron_right |